(19)
(11) EP 1 537 605 A1

(12)

(43) Date of publication:
08.06.2005 Bulletin 2005/23

(21) Application number: 03761093.8

(22) Date of filing: 17.06.2003
(51) International Patent Classification (IPC)7H01L 31/109
(86) International application number:
PCT/US2003/019144
(87) International publication number:
WO 2004/001860 (31.12.2003 Gazette 2004/01)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 19.06.2002 US 175586
19.06.2002 US 174889

(71) Applicant: Nantero, Inc.
Woburn, MA 01801 (US)

(72) Inventors:
  • VOGELI, Bernhard
    Boston, MA 02114 (US)
  • RUECKES, Thomas
    Boston, MA 02114 (US)
  • SEGAL, Brent, M.
    Woburn, MA 01801 (US)

(74) Representative: Hutchinson, Glenn Stanley 
Harrison Goddard Foote,Fountain PrecinctBalm Green
Sheffield S1 2JA
Sheffield S1 2JA (GB)

   


(54) NANOTUBE PERMEABLE BASE TRANSISTOR AND METHOD OF MAKING SAME