(19)
(11) EP 1 540 044 A2

(12)

(88) Date of publication A3:
28.04.2005

(43) Date of publication:
15.06.2005 Bulletin 2005/24

(21) Application number: 03762324.6

(22) Date of filing: 24.06.2003
(51) International Patent Classification (IPC)7: C25D 7/12
(86) International application number:
PCT/US2003/020949
(87) International publication number:
WO 2004/003663 (08.01.2004 Gazette 2004/02)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 28.06.2002 DE 10228998
26.11.2002 US 304903

(71) Applicant: ADVANCED MICRO DEVICES INC.
Sunnyvale,California 94088-3453 (US)

(72) Inventor:
  • PREUSSE, Axel
    01445 Radebeul (DE)

(74) Representative: Grünecker, Kinkeldey, Stockmair & SchwanhäusserAnwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)

   


(54) APPARATUS AND METHOD FOR TREATING A SUBSTRATE ELECTROCHEMICALLY WHILE REDUCING METAL CORROSION