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EP 1 540 185 A1

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(43) Date of publication: 15.06.2005 Bulletin 2005/24 (21) Application number: 03792666.4 (22) Date of filing: 11.08.2003

(51) International Patent Classification (IPC)7: F04C 29/10, F04C 13/00 (86) International application number: PCT/JP2003/010207 (87) International publication number: WO 2004/018879 (04.03.2004 Gazette 2004/10)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR (30) Priority: 20.08.2002 JP 2002239728 (71) Applicant: EBARA CORPORATION Ohta-ku,Tokyo 144-8510 (JP)

(72) Inventors: IIJIMA, Naoki,c/o Ebara Densan Ltd Tokyo 144-8575 (JP) WATANABE, Jiro,c/o Ebara Densan Ltd Tokyo 144-8575 (JP) CHINO, Hiroyuki,c/o Ebara Densan Ltd Tokyo 144-8575 (JP) YANAGISAWA, Kiyoshi,c/o Ebara Corporation Tokyo 144-8510 (JP) KAWAMURA, Takeshi,c/o Ebara Corporation Tokyo 144-8510 (JP) (74) Representative: Wagner, Karl H., Dipl.-Ing. et al Wagner & Geyer,Patentanwälte,Gewürzmühlstrasse 5 80538 München 80538 München (DE)