VARIABLE HEATER ELEMENT FOR LOW TO HIGH TEMPERATURE RANGES - Patent 1540258

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EP 1 540 258 A1

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(43)	Date of publication:
	15.06.2005 Bulletin 2005/24

(21)	Application number: 03764467.1

(22)	Date of filing: 10.07.2003

(51)	International Patent Classification (IPC)⁷: F26B 3/30

(86)	International application number:
	PCT/US2003/021648

(87)	International publication number:
	WO 2004/008054 (22.01.2004 Gazette 2004/04)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
	Designated Extension States:
	AL LT LV MK

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Priority:

15.07.2002 US 396536 P
22.11.2002 US 428526 P

(71)	Applicant: Aviza Technology, Inc.
	Scotts Valley, CA 95066 (US)

(72)	Inventor:
	QIU, Taiquing Los Gatos, CA 95032 (US)

(74)	Representative: Stoner, Gerard Patrick et al
	Mewburn Ellis LLPYork House23 Kingsway London WC2B 6HP London WC2B 6HP (GB)

(54)	VARIABLE HEATER ELEMENT FOR LOW TO HIGH TEMPERATURE RANGES