(19)
(11) EP 1 540 714 A2

(12)

(88) Date of publication A3:
13.05.2004

(43) Date of publication:
15.06.2005 Bulletin 2005/24

(21) Application number: 03793301.7

(22) Date of filing: 22.08.2003
(51) International Patent Classification (IPC)7H01L 21/20
(86) International application number:
PCT/US2003/026363
(87) International publication number:
WO 2004/019381 (04.03.2004 Gazette 2004/10)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 26.08.2002 US 228358

(71) Applicant: Sigma Laboratories of Arizona, Incorporated
Tucson, AZ 85737 (US)

(72) Inventors:
  • MIKHAEL, Michael, G.
    Tucson, AZ 85750 (US)
  • YIALIZIS, Angelo
    Tucson, AZ 85737 (US)
  • ELLWANGER, Richard, E.
    Tucson, AZ 85739 (US)

(74) Representative: Johnstone, Helen Margaret 
Eric Potter ClarksonPark View House58 The Ropewalk
Nottingham NG1 5DD
Nottingham NG1 5DD (GB)

   


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