WAFER-LEVEL SEAL FOR NON-SILICON-BASED DEVICES - Patent 1540736

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EP 1 540 736 A2

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(88)	Date of publication A3:
	03.06.2004

(43)	Date of publication:
	15.06.2005 Bulletin 2005/24

(21)	Application number: 03791559.2

(22)	Date of filing: 09.06.2003

(51)	International Patent Classification (IPC)⁷: H01L 29/72

(86)	International application number:
	PCT/US2003/018103

(87)	International publication number:
	WO 2004/021398 (11.03.2004 Gazette 2004/11)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
	Designated Extension States:
	AL LT LV MK

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Priority:

28.08.2002 US 231356
28.08.2002 US 231357

(71)	Applicant: Silicon Light Machines Corporation
	Sunnyvale, CA 94089 (US)

(72)	Inventors:
	MILLER, Gregory, D. Foster City, CA 94404 (US) BRUNER, Mike Saratoga, CA 95070 (US) RAGAN, Lawrence, H. Austin, TX 78737 (US) GREEN, Gary, W. Pleasanton, CA 94566 (US)

(74)	Representative: Howe, Steven
	Lloyd WiseCommonwealth House,1-19 New Oxford Street London WC1A 1LW London WC1A 1LW (GB)

(54)	WAFER-LEVEL SEAL FOR NON-SILICON-BASED DEVICES