POLISHING PAD WITH WINDOW FOR PLANARIZATION - Patent 1542832

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EP 1 542 832 A1

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(43)	Date of publication:
	22.06.2005 Bulletin 2005/25

(21)	Application number: 03759509.7

(22)	Date of filing: 18.09.2003

(51)	International Patent Classification (IPC)⁷: B24B 37/04, B24D 7/12, B24D 13/14

(86)	International application number:
	PCT/US2003/030139

(87)	International publication number:
	WO 2004/028744 (08.04.2004 Gazette 2004/15)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
	Designated Extension States:
	AL LT LV MK

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Priority:

25.09.2002 US 413367 P

(71)	Applicant: PPG Industries Ohio, Inc.
	Cleveland, OH 44111 (US)

(72)	Inventors:
	SWISHER, Robert Pittsburgh, PA 15238 (US) ALLISON, William, C. Murrysville, PA 15668 (US) WANG, Alan, E. Gibsonia, PA 15044 (US)

(74)	Representative: Sternagel, Fleischer, Godemeyer & PartnerPatentanwälte
	Braunsberger Feld 29 51429 Bergisch Gladbach 51429 Bergisch Gladbach (DE)

(54)	POLISHING PAD WITH WINDOW FOR PLANARIZATION