(19)
(11) EP 1 543 084 A2

(12)

(88) Date of publication A3:
03.06.2004

(43) Date of publication:
22.06.2005 Bulletin 2005/25

(21) Application number: 03767120.3

(22) Date of filing: 01.08.2003
(51) International Patent Classification (IPC)7: C09G 1/02, B24B 1/00, H01L 21/321
(86) International application number:
PCT/US2003/024286
(87) International publication number:
WO 2004/013242 (12.02.2004 Gazette 2004/07)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 05.08.2002 US 401109 P
28.07.2003 US 627775

(71) Applicant: PPG Industries Ohio, Inc.
Cleveland, OH 44111 (US)

(72) Inventors:
  • HELLRING, Stuart D.
    Pittsburgh, PA 15243 (US)
  • LI, Yuzhuo
    Potsdam, NY 13676 (US)
  • AUGER, Robert L.
    Pittsburgh, PA 15221 (US)

(74) Representative: Sternagel, Fleischer, Godemeyer & PartnerPatentanwälte 
Braunsberger Feld 29
51429 Bergisch Gladbach
51429 Bergisch Gladbach (DE)

   


(54) PROCESS FOR REDUCING DISHING AND EROSION DURING CHEMICAL MECHANICAL PLANARIZATION