......DE......GB..IT....NL..........................................................................*JDIM360 Ver 2.15 (14 Jul 2008) - 2999001/01543546CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120100616W173deBibliographieenBibliographyfrBibliographieEP03788439.2200308132005031420070412enenen21866820020814US2010061620102420050622200525201003312010132009102320100616201024H01L 21/30 20060101AFI20040312BHEP H01L 21/46 20060101ALI20040312BHEP H01L 21/3205 20060101ALI20040312BHEP H01L 21/332 20060101ALI20040312BHEP H01L 21/336 20060101ALI20040312BHEP H01L 21/425 20060101ALI20040312BHEP H01L 29/72 20060101ALI20040312BHEP H01L 29/76 20060101ALI20040312BHEP H01L 29/94 20060101ALI20040312BHEP H01L 31/062 20060101ALI20040312BHEP deVERFAHREN ZUR HERSTELLUNG EINES ISOLIERTEN FELDEFFEKT-TRANSISTORS IN EINEM EPI-LOSEN SUBSTRATenPROCESS FOR FABRICATING AN ISOLATED FIELD EFFECT TRANSISTOR IN AN EPI-LESS SUBSTRATEfrPROCEDE D'FABRICATION D'UN TRANSISTOR A EFFET DE CHAMP ISOLE DANS UN SUBSTRAT DEPOURVU DE COUCHE EPITAXIALEWO-A-02/052649WO-A-03/054950GB-A- 2 320 812JP-A- 2000 114 361US-A- 5 286 995US-A- 5 569 620US-A- 5 798 295US-A- 5 817 546US-A- 2001 000 288US-B1- 6 184 557US-B1- 6 251 757US-B1- 6 297 119US-B1- 6 359 317US-B1- 6 365 447US-B1- 6 391 754US-B1- 6 406 974US-B1- 6 501 131US-B1- 6 586 297US-B1- 6 630 699US-B2- 6 617 217CONTIERO C ET AL: "LDMOS implementation by large tilt implant in 0.6 /spl mu/m BCD5 process, flash memory compatible" POWER SEMICONDUCTOR DEVICES AND ICS, 1996. ISPSD '96 PROCEEDINGS., 8TH INTERNATIONAL SYMPOSIUM ON MAUI, HI, USA 20-23 MAY 1996, NEW YORK, NY, USA,IEEE, US, 20 May 1996 (1996-05-20), pages 75-78, XP010165456 ISBN: 0-7803-3106-0KUROI T ET AL: "BIPOLAR TRANSISTOR WITH A BURIED LAYER FORMED BY HIGH-ENERGY ION IMPLANTATION FOR SUBHALF-MICRON BIPOLAR-COMPLEMENTARY METAL OXIDE SEMICONDUCTOR LSIS" JAPANESE JOURNAL OF APPLIED PHYSICS, JAPAN SOCIETY OF APPLIED PHYSICS, TOKYO, JP, vol. 33, no. 1B, PART 1, January 1994 (1994-01), pages 541-545, XP000596411 ISSN: 0021-49222006120610158458.920100330WILLIAMS, Richard, K.10292 Norwich Ave.Cupertino, CA 95014USCORNELL, Michael, E.1576 Summerfield DriveCampbell, CA 95008USCHAN, Wai Tien2/F, House 80B, JC Castle 18 Shan Tong RoadTai Po, N.T., Hong KongCNAdvanced Analogic Technologies, Inc.1063684077888EP (KI/SF)3230 Scott Blvd.Sanza Clara, California 95054USKirschner, Klaus Dieteret al00006506Puschmann Borchert Bardehle Patentanwälte Partnerschaft Postfach 10 12 3180086 MünchenDEDEGBITNLUS200302536120030813enWO20040173952004022620040920050622200525