USER INTERFACE FOR QUANTIFYING WAFER NON-UNIFORMITIES AND GRAPHICALLY EXPLORE SIGNIFICANCE - Patent 1543550

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EP 1 543 550 A2

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(88)	Date of publication A3:
	15.07.2004

(43)	Date of publication:
	22.06.2005 Bulletin 2005/25

(21)	Application number: 03756878.9

(22)	Date of filing: 24.09.2003

(51)	International Patent Classification (IPC)⁷: H01L 21/66

(86)	International application number:
	PCT/US2003/030456

(87)	International publication number:
	WO 2004/030083 (08.04.2004 Gazette 2004/15)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
	Designated Extension States:
	AL LT LV MK

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Priority:

26.09.2002 US 414021 P
24.12.2002 US 331194
30.05.2003 US 452248

(71)	Applicant: LAM RESEARCH CORPORATION
	Fremont, CA 94538 (US)

(72)	Inventors:
	LUQUE, Jorge Redwood City, CA 94061 (US) BAILEY, III, Andrew, D. Pleasanton, CA 94566 (US) WILCOXSON, Mark Piedmont, CA 94611 (US)

(74)	Representative: Dendorfer, Claus, Dr.
	Wächtershäuser & HartzWeinstrasse 8 80333 München 80333 München (DE)

(54)	USER INTERFACE FOR QUANTIFYING WAFER NON-UNIFORMITIES AND GRAPHICALLY EXPLORE SIGNIFICANCE