(19)
(11) EP 1 547 119 A1

(12)

(43) Date of publication:
29.06.2005 Bulletin 2005/26

(21) Application number: 03791500.6

(22) Date of filing: 01.09.2003
(51) International Patent Classification (IPC)7H01J 37/153, H01J 37/05, H01J 37/12
(86) International application number:
PCT/NL2003/000612
(87) International publication number:
WO 2004/021391 (11.03.2004 Gazette 2004/11)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 30.08.2002 US 407012 P

(71) Applicants:
  • TECHNISCHE UNIVERSITEIT DELFT
    2600 AA Delft (NL)
  • Stichting Fundementeel Onderzoek der Materie (FOM)
    3527 JP Utrecht (NL)

(72) Inventors:
  • KRUIT, Pieter
    NL-2611 EB Delft (NL)
  • VAN AKEN, Rogier, Herman
    NL-2612 JG Delft (NL)

(74) Representative: van Westenbrugge, Andries et al
Nederlandsch OctrooibureauP.O. Box 29720
2502 LS The Hague
2502 LS The Hague (NL)

   


(54) DEVICE WITH FOIL CORRECTOR FOR ELECTRON OPTICAL ABERRATIONS AT LOW ENERGY