(19)
(11) EP 1 548 809 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
24.02.2010 Bulletin 2010/08

(45) Mention of the grant of the patent:
23.12.2009 Bulletin 2009/52

(21) Application number: 03784632.6

(22) Date of filing: 08.08.2003
(51) International Patent Classification (IPC): 
H01L 21/205(2006.01)
H01L 21/00(2006.01)
 H01L 21/31(2006.01)
(86) International application number:
PCT/JP2003/010173
(87) International publication number:
WO 2004/015750 (19.02.2004 Gazette 2004/08)

(54)

HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS

WÀRMEBEHANDLUNGSVERFAHREN UND WÀRMEBEHANDLUNGSVORRICHTUNG

PROCEDE DE TRAITEMENT THERMIQUE ET APPAREIL DE TRAITEMENT THERMIQUE

(84) Designated Contracting States:
DE FR GB IT NL

(30) Priority: 09.08.2002 JP 2002233513
28.04.2003 JP 2003124153

(43) Date of publication of application:
29.06.2005 Bulletin 2005/26

(73) Proprietor: TOKYO ELECTRON LIMITED
Minato-ku Tokyo 107-8481 (JP)

(72) Inventors:
  • SUZUKI, Keisuke, c/o Tokyo Electron Limited
    Tokyo 107-8481 (JP)
  • WANG, Wenling, c/o Tokyo Electron Limited
    Tokyo 107-8481 (JP)
  • YONEKAWA, Tsukasa, c/o Tokyo Electron Limited
    Tokyo 107-8481 (JP)
  • IKEUCHI, Toshiyuki, c/o Tokyo Electron Limited
    Tokyo 107-8481 (JP)
  • SATO, Toru, c/o Tokyo Electron Limited
    Tokyo 107-8481 (JP)

(74) Representative: Liesegang, Eva 
Boehmert & Boehmert Pettenkoferstrasse 20-22
80336 München
80336 München (DE)


(56) References cited: : 
JP-A- 2000 340 554
JP-A- 2002 141 347
US-B1- 6 211 094
 JP-A- 2002 043 300
US-A1- 2002 014 483
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).