(19)
(11) EP 1 551 527 A1

(12)

(43) Date of publication:
13.07.2005 Bulletin 2005/28

(21) Application number: 02770618.3

(22) Date of filing: 18.10.2002
(51) International Patent Classification (IPC)7B01D 29/60, B01D 35/143
(86) International application number:
PCT/US2002/033365
(87) International publication number:
WO 2004/037383 (06.05.2004 Gazette 2004/19)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(71) Applicant: PTI Technologies, Inc.
Oxnard, CA 93030-7983 (US)

(72) Inventor:
  • MOSCARITOLO, Daniel
    Newbury Park, CA 91320-3419 (US)

(74) Representative: Holmes, Matthew Peter et al
MARKS & CLERK,Sussex House,83-85 Mosley Street
Manchester M2 3LG
Manchester M2 3LG (GB)

   


(54) PROGNOSTIC HEALTH MONITORING OF FLUIDIC SYSTEMS USING MEMS (MICRO-ELECTRO-MECHANICAL SYSTEMS) TECHNOLOGY