| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
Designated Extension States: |
|
AL LT LV MK |
| (30) |
Priority: |
11.09.2002 US 241805
11.09.2002 US 241815
|
| (71) |
Applicant: Entegris, Inc. |
|
Chaska, MN 55318 (US) |
|
| (72) |
Inventors: |
|
- EXTRAND, Charles, W.
Minneapolis, MN 55419 (US)
- HENDERER, Ralph
Excelsior, MN 55331 (US)
- MANGANIELLO, Frank
Maplewood, MN 55119 (US)
|
| (74) |
Representative: Schmit, Christian Norbert Marie |
|
Schmit Chretien Schihin,8, place du Ponceau
95610 Cergy
95610 Cergy (FR) |
|
