(19)
(11) EP 1 552 032 A1

(12)

(43) Date of publication:
13.07.2005 Bulletin 2005/28

(21) Application number: 03771624.8

(22) Date of filing: 14.07.2003
(51) International Patent Classification (IPC)7C23C 14/34, C22F 1/08
(86) International application number:
PCT/US2003/022080
(87) International publication number:
WO 2004/011691 (05.02.2004 Gazette 2004/06)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 16.07.2002 US 396544 P
15.05.2003 US 471182 P
09.07.2003 US 614807

(71) Applicant: Honeywell International Inc.
Morristown, NJ 07962-9806 (US)

(72) Inventors:
  • SEGAL, Vladimir
    Veradale, WA 99037 (US)
  • WUWEN, Yi
    Veradale, WA 99037 (US)
  • FERRASSE, Stephane
    Veradale, WA 99037 (US)
  • WU, Chi tse
    Veradale, WA 99037 (US)
  • STROTHERS, Susan, D.
    Spokane, WA 99217 (US)
  • ALFORD, Frank, A.
    Veradale, WA 99037 (US)
  • WILLETT, William, B.
    Spokane, WA 99216 (US)

(74) Representative: Fox-Male, Nicholas Vincent Humbert 
Eric Potter ClarksonPark View House58 The Ropewalk
Nottingham NG1 5DD
Nottingham NG1 5DD (GB)

   


(54) COPPER SPUTTERING TARGETS AND METHODS OF FORMING COPPER SPUTTERING TARGETS