(19)

(11)

EP 1 556 881 A2

(12)

(88) Date of publication A3: 16.09.2004 (43) Date of publication: 27.07.2005 Bulletin 2005/30 (21) Application number: 03809889.3 (22) Date of filing: 30.10.2003

(51) International Patent Classification (IPC)7: H01J 37/302, H01J 37/317, H01J 37/304, G03F 7/20 (86) International application number: PCT/NL2003/000745 (87) International publication number: WO 2004/040614 (13.05.2004 Gazette 2004/20)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI Designated Extension States: AL LT LV MK (30) Priority: 30.10.2002 US 422758 P (71) Applicant: MAPPER LITHOGRAPHY IP B.V. 2628 CJ Delft (NL)	(72) Inventors: Wieland, Marco Jan-Jaco NL-2628 CJ Delft (NL) Kampherbeek, Bert Jan NL-2628 CJ Delft (NL) Van Veen, Alexander Hendrik Vincent NL-2628 CJ Delft (NL) KRUIT, Pieter NL-2611 EB Delft (NL) (74) Representative: Nederlof, Etienne C.  Octrooibureau Vriesendorp & Gaade B.V.,Postbus 266 2501 AW Den Haag 2501 AW Den Haag (NL)