(19)
(11) EP 1 563 333 A1

(12)

(43) Date of publication:
17.08.2005 Bulletin 2005/33

(21) Application number: 03786631.6

(22) Date of filing: 10.11.2003
(51) International Patent Classification (IPC)7G02B 26/08
(86) International application number:
PCT/US2003/035776
(87) International publication number:
WO 2004/049034 (10.06.2004 Gazette 2004/24)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 22.11.2002 US 302387
22.11.2002 US 302413

(71) Applicant: Advanced Nano Systems
San Jose, CA 95129 (US)

(72) Inventors:
  • FU, Yee-Chung
    Fremont, CA 94539 (US)
  • KUO, Ting-Tung
    San Jose, CA 95129 (US)

(74) Representative: Powell, Stephen David et al
WILLIAMS POWELLMorley House26-30 Holborn Viaduct
London EC1A 2BP
London EC1A 2BP (GB)

   


(54) MEMS SCANNING MIRROR WITH TUNABLE NATURAL FREQUENCY