(19)
(11) EP 1 567 034 A2

(12)

(88) Date of publication A3:
02.06.2005

(43) Date of publication:
31.08.2005 Bulletin 2005/35

(21) Application number: 02784595.7

(22) Date of filing: 26.11.2002
(51) International Patent Classification (IPC)7A47G 19/08
(86) International application number:
PCT/US2002/037860
(87) International publication number:
WO 2003/046950 (05.06.2003 Gazette 2003/23)
(84) Designated Contracting States:
DE FR GB IT

(30) Priority: 27.11.2001 US 333689 P

(71) Applicant: Entegris, Inc.
Chaska, MN 55318 (US)

(72) Inventors:
  • BHATT, Sanjiv, M.
    Minnetonka, MN 55345 (US)
  • EGGUM, Shawn, D.
    Victoria, MN 55386 (US)

(74) Representative: Geyer, Werner 
Patentanwälte Geyer, Fehners & Partner Perhamerstrasse 31
80687 München
80687 München (DE)

   


(54) SEMICONDUCTOR COMPONENT HANDLING DEVICE HAVING A PERFORMANCE FILM