(19)
(11)
EP 1 567 034 A2
(12)
(88)
Date of publication A3:
02.06.2005
(43)
Date of publication:
31.08.2005
Bulletin 2005/35
(21)
Application number:
02784595.7
(22)
Date of filing:
26.11.2002
(51)
International Patent Classification (IPC)
7
:
A47G
19/08
(86)
International application number:
PCT/US2002/037860
(87)
International publication number:
WO 2003/046950
(
05.06.2003
Gazette 2003/23)
(84)
Designated Contracting States:
DE FR GB IT
(30)
Priority:
27.11.2001
US 333689 P
(71)
Applicant:
Entegris, Inc.
Chaska, MN 55318 (US)
(72)
Inventors:
BHATT, Sanjiv, M.
Minnetonka, MN 55345 (US)
EGGUM, Shawn, D.
Victoria, MN 55386 (US)
(74)
Representative:
Geyer, Werner
Patentanwälte Geyer, Fehners & Partner Perhamerstrasse 31
80687 München
80687 München (DE)
(54)
SEMICONDUCTOR COMPONENT HANDLING DEVICE HAVING A PERFORMANCE FILM