| (84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR |
| (71) |
Applicant: APPLIED MATERIALS, INC. |
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California 95052 (US) |
|
| (72) |
Inventors: |
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- SAMOILOV, Arkadii, V.
Sunnyvale, CA 94087 (US)
- DUBOIS, Dale, R.
Los Gatos, CA 95032 (US)
- SCUDDER, Lance, A.
Santa Clara, CA 95054 (US)
- COMITA, Paul, B.
Menlo Park, CA 94025 (US)
- WASHINGTON, Lori, D.
Union City, CA 94587 (US)
- CARLSON, David, K.
Santa Clara, CA 95051 (US)
- ANDERSON, Roger, N.
Sunnyvale, CA 94087 (US)
|
| (74) |
Representative: Bayliss, Geoffrey Cyril |
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BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB) |
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