(19)
(11) EP 1 568 074 A1

(12)

(43) Date of publication:
31.08.2005 Bulletin 2005/35

(21) Application number: 02788980.7

(22) Date of filing: 21.11.2002
(51) International Patent Classification (IPC)7: H01L 21/302
(86) International application number:
PCT/KR2002/002176
(87) International publication number:
WO 2004/075275 (02.09.2004 Gazette 2004/36)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(71) Applicants:
  • Doosan DND Co., Ltd.
    Kyunggi-Do 425-100 (KR)
  • Jung, Taek-Soo
    Anyang City 431-080 (KR)

(72) Inventor:
  • JUNG, Taek-Soo, 205 Ho 116 Dong Saem, Maeul Apt.
    431-080 Anyang City (KR)

(74) Representative: Grunert, Marcus 
Hössle Kudlek & Partner Patentanwälte Postfach 10 23 38
70019 Stuttgart
70019 Stuttgart (DE)

   


(54) CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING APPARATUS