(19)

(11)

EP 1 573 796 A1

(12)

(43) Date of publication: 14.09.2005 Bulletin 2005/37 (21) Application number: 03777875.0 (22) Date of filing: 28.10.2003

(51) International Patent Classification (IPC)7: H01L 21/314 (86) International application number: PCT/US2003/033763 (87) International publication number: WO 2004/061930 (22.07.2004 Gazette 2004/30)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR (30) Priority: 17.12.2002 US 321310 (71) Applicant: RAYTHEON COMPANY Massachusetts 02421 (US)	(72) Inventors: MARSH, Philbert, Francis Andover, MA 01810 (US) WHELAN, Colin, S. Wakefield, MA 01880 (US) (74) Representative: Jackson, David Spence  REDDIE & GROSE 16, Theobalds Road London, WC1X 8PL London, WC1X 8PL (GB)