(19)
(11) EP 1 573 804 A1

(12)

(43) Date of publication:
14.09.2005 Bulletin 2005/37

(21) Application number: 02798557.1

(22) Date of filing: 19.12.2002
(51) International Patent Classification (IPC)7H01L 21/84
(86) International application number:
PCT/US2002/040869
(87) International publication number:
WO 2004/059727 (15.07.2004 Gazette 2004/29)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SI SK TR
Designated Extension States:
AL LT LV MK RO

(71) Applicant: International Business Machines Corporation
Armonk, NY 10504 (US)

(72) Inventors:
  • FRIED, David, M.
    Ithaca, NY 14850 (US)
  • NOWAK, Edward, J.
    Essex Junction, VT 05452 (US)
  • RAINEY, BethAnn
    South Burlington, VT 05403 (US)

(74) Representative: Mather, Belinda Jane 
IBM United Kingdom Limited Intellectual Property Department Hursley Park Winchester,
Hampshire SO21 2JN
Hampshire SO21 2JN (GB)

   


(54) METHODS OF FORMING STRUCTURE AND SPACER AND RELATED FINFET