(19)
(11) EP 1 576 650 A2

(12)

(43) Date of publication:
21.09.2005 Bulletin 2005/38

(21) Application number: 03754388.1

(22) Date of filing: 15.08.2003
(51) International Patent Classification (IPC)7H01L 21/00
(86) International application number:
PCT/US2003/025435
(87) International publication number:
WO 2004/017371 (26.02.2004 Gazette 2004/09)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 15.08.2002 US 403796 P

(71) Applicant: THE CHARLES STARK DRAPER LABORATORY, INC.
Cambridge, MA 02139 (US)

(72) Inventors:
  • SAWYER, William, D.
    Arlington, MA 02474 (US)
  • BORENSTEIN, Jeffrey, T.
    Holliston, MA 02146 (US)

(74) Representative: Hill, Justin John 
McDermott Will & Emery UK LLP 7 Bishopsgate
London EC2N 3AR
London EC2N 3AR (GB)

   


(54) METHOD FOR MICROFABRICATING STRUCTURES USING SILICON-ON-INSULATOR MATERIAL