ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIROMKCYALTRBGCZEEHU..SK................*XDIM350 (Ver 2.1 Jan 2001) 1100000/0 1710000/01576650A220050921EP03754388.12003081520050315EnEnEn403796 P20020815US20050921200538200509212005387 7H 01L 21/00 AdeVERFAHERN ZUR MIKROHERSTELLUNG VON STRUKTUREN UNTER VERWENDUNG VON SILIZIUM-AUF-ISOLATOR-MATERIALenMETHOD FOR MICROFABRICATING STRUCTURES USING SILICON-ON-INSULATOR MATERIALfrPROCEDE DE MICROUSINAGE DE STRUCTURES UTILISANT UN MATERIAU DE SILICIUM SUR ISOLANTTHE CHARLES STARK DRAPER LABORATORY, INC.00305181600914PEP555 Technology SquareCambridge, MA 02139USSAWYER, William, D.62 Magnolia StreetArlington, MA 02474USBORENSTEIN, Jeffrey, T.936 Highland StreetHolliston, MA 02146USHill, Justin John00127251McDermott Will & Emery UK LLP 7 BishopsgateLondon EC2N 3ARGBATBEBGCHCYCZDEDKEEESFIFRGBGRHUIEITLILUMCNLPTROSESISKTRALLTLVMKUS200302543520030815EnWO200401737120040226200409