(19)
(11) EP 1 576 656 A2

(12)

(88) Date of publication A3:
28.04.2005

(43) Date of publication:
21.09.2005 Bulletin 2005/38

(21) Application number: 03814016.6

(22) Date of filing: 17.12.2003
(51) International Patent Classification (IPC)7H01L 21/00
(86) International application number:
PCT/US2003/039985
(87) International publication number:
WO 2004/059696 (15.07.2004 Gazette 2004/29)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 23.12.2002 US 328302

(71) Applicant: Advanced Energy Technology Inc.
Delaware 19803 (US)

(72) Inventors:
  • KRASSOWSKI, Daniel, W.
    Columbia Station, OH 44028 (US)
  • CHEN, Gary, G.
    Parma, OH 44129 (US)
  • BURKETT, Thomas, W.
    Avon Lake, OH 44012 (US)
  • FORD, Brian, H.
    Grayslake, IL 60030 (US)
  • TZENG, Jing-Wen
    Irvine, CA 92602 (US)
  • NORLEY, Julian
    Chagrin Falls, OH 44023 (US)
  • SMALC, Martin, D.
    Parma, OH 44129 (US)

(74) Representative: W.P. Thompson & Co. 
Coopers Building, Church Street
Liverpool L1 3AB
Liverpool L1 3AB (GB)

   


(54) FLEXIBLE GRAPHITE THERMAL MANAGEMENT DEVICES