(19)

(11)

EP 1 579 034 A1

(12)

(43) Date of publication: 28.09.2005 Bulletin 2005/39 (21) Application number: 03808972.8 (22) Date of filing: 17.10.2003

(51) International Patent Classification (IPC)7: C23F 13/00, C23F 13/02, C23F 13/04, C23F 13/06 (86) International application number: PCT/US2003/029133 (87) International publication number: WO 2004/035865 (29.04.2004 Gazette 2004/18)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR Designated Extension States: AL LT LV MK (30) Priority: 17.10.2002 US 271734 12.11.2002 US 291770 (71) Applicant: Applied Semiconductor International, Ltd. 5432 Neuenhof (CH)	(72) Inventors: KHORRAMI, Farshad, Brooklyn, NY 11201 (US) DOWLING, David, B. New York, NY 10006 (US) (74) Representative: Poulin, Gérard et al BREVALEX 3, rue du Docteur Lancereaux 75008 Paris 75008 Paris (FR)