(19)
(11) EP 1 579 495 A2

(12)

(88) Date of publication A3:
14.04.2005

(43) Date of publication:
28.09.2005 Bulletin 2005/39

(21) Application number: 03814808.6

(22) Date of filing: 16.12.2003
(51) International Patent Classification (IPC)7: H01L 21/44, H01L 23/34, H01L 27/10
(86) International application number:
PCT/US2003/039878
(87) International publication number:
WO 2004/061903 (22.07.2004 Gazette 2004/30)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 18.12.2002 US 321669
09.12.2003 US 730064

(71) Applicant: Easic Corporation
San Jose, CA 95124 (US)

(72) Inventors:
  • OR-BACH, Zvi
    San Jose, CA 95124 (US)
  • COOKE, Laurence
    Los Gatos, CA 95033 (US)
  • APOSTOL, Adrian
    R-610106 Neamt (RO)
  • IACOBUT, Romeo
    R-617091 Neamt (RO)

(74) Representative: Waddington, Richard et al
Appleyard Lees, 15 Clare Road
Halifax HX1 2HY
Halifax HX1 2HY (GB)

   


(54) METHOD FOR FABRICATION OF SEMICONDUCTOR DEVICE