(19)

(11)

EP 1 584 104 A2

(12)

(88) Date of publication A3: 03.03.2005 (43) Date of publication: 12.10.2005 Bulletin 2005/41 (21) Application number: 03799903.4 (22) Date of filing: 12.12.2003

(51) International Patent Classification (IPC)7: H01L 21/425, H01L 21/26, H01L 21/44, H01L 21/302, H01L 21/324 (86) International application number: PCT/US2003/039754 (87) International publication number: WO 2004/053945 (24.06.2004 Gazette 2004/26)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR Designated Extension States: AL LT LV MK (30) Priority: 12.12.2002 US 433866 P (71) Applicant: Epion Corporation Billerica, MA 01821 (US)	(72) Inventors: KIRKPATRICK, Allen, R. Carlisle, MA 01741 (US) HAUTALA, John, J. Beverly, MA 01915 (US) TABAT, Martin, D. Nashua, NH 03063 (US) TETREAULT, Thomas, G. Manchester, NH 03104 (US) KIRKPATRICK, Sean Littleton, MA 01460 (US) (74) Representative: Casey, Lindsay Joseph et al F. R. Kelly & Co. 27 Clyde Road Ballsbridge Dublin 4 Dublin 4 (IE)