(19)

(11)

EP 1 588 122 A1

(12)

(43) Date of publication: 26.10.2005 Bulletin 2005/43 (21) Application number: 03816399.4 (22) Date of filing: 21.08.2003

(51) International Patent Classification (IPC)7: G01B 11/02 (86) International application number: PCT/US2003/027451 (87) International publication number: WO 2004/083775 (30.09.2004 Gazette 2004/40)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR (30) Priority: 28.01.2003 US 353267 (71) Applicant: Agilent Technologies, Inc. Loveland, CO 80537 (US)	(72) Inventors: FLOWERS, John, P. San Jose, CA 95136 (US) KALEM, Lee, C. Los Gatos, CA 95003 (US) (74) Representative: Schoppe, Fritz et al Patentanwälte Schoppe, Zimmermann, Stöckeler & Zinkler Postfach 246 82043 Pullach bei München 82043 Pullach bei München (DE)