(19)
(11) EP 1 588 405 A2

(12)

(88) Date of publication A3:
30.09.2004

(43) Date of publication:
26.10.2005 Bulletin 2005/43

(21) Application number: 04703293.3

(22) Date of filing: 19.01.2004
(51) International Patent Classification (IPC)7H01L 21/00
(86) International application number:
PCT/NL2004/000040
(87) International publication number:
WO 2004/066369 (05.08.2004 Gazette 2004/32)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 22.01.2003 NL 1022463

(71) Applicant: FICO B.V.
6921 RW Duiven (NL)

(72) Inventors:
  • VAN EGMOND, Henri, Joseph
    NL-6716 DN Ede (NL)
  • ZIJL, Joannes, Leonardus, Jurrian
    NL-6716 CK Ede (NL)
  • RENSEN, Marcel, Hermanus, Johannes
    NL-7447 AX Hellendoorn (NL)

(74) Representative: Van den Heuvel, Henricus Theodorus et al
Patentwerk BV P.O. Box 1514
5200 BN 's-Hertogenbosch
5200 BN 's-Hertogenbosch (NL)

   


(54) CARRIER, HOLDER, LASER CUTTING DEVICE AND METHOD FOR SEPARATING SEMICONDUCTOR PRODUCTS USING LASER LIGHT