(19)

(11)

EP 1 588 425 A3

(12)

(88) Date of publication A3: 10.11.2005 (43) Date of publication A2: 26.10.2005 Bulletin 2005/43 (21) Application number: 03815647.7 (22) Date of filing: 10.12.2003

(51) International Patent Classification (IPC)7: H01L 31/058, F02G 1/053, F02G 1/055, F23C 7/06, F23C 9/00 (86) International application number: PCT/US2003/039327 (87) International publication number: WO 2004/068593 (12.08.2004 Gazette 2004/33)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR Designated Extension States: AL LT LV MK (30) Priority: 23.01.2003 US 442094 P (71) Applicant: Philip Morris USA Inc. Richmond, VA 23234 (US)	(72) Inventor: PELLIZZARI, Roberto, O. Groton, MA 01450 (US) (74) Representative: Kador, Ulrich  Kador & Partner Corneliusstrasse 15 80469 München 80469 München (DE)