(19)

(11)

EP 1 590 604 A1

(12)

(43) Date of publication: 02.11.2005 Bulletin 2005/44 (21) Application number: 04708071.8 (22) Date of filing: 04.02.2004

(51) International Patent Classification (IPC)7: F23G 5/027, F23G 5/30 (86) International application number: PCT/JP2004/001142 (87) International publication number: WO 2004/070271 (19.08.2004 Gazette 2004/34)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR Designated Extension States: AL LT LV MK (30) Priority: 07.02.2003 JP 2003030339 (71) Applicant: EBARA CORPORATION Tokyo 144-8510 (JP)	(72) Inventors: ISHIKAWA, Ryuichi,C/O Ebara Corporation Tokyo 1148510 (JP) GOKE, Chikao,C/O Ebara Corporation Tokyo 1448510 (JP) (74) Representative: Emde, Eric  Wagner & Geyer, Gewürzmühlstrasse 5 80538 München 80538 München (DE)