(84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
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Designated Extension States: |
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AL LT LV MK |
(30) |
Priority: |
06.02.2003 US 360322 06.02.2003 US 360320 06.02.2003 US 360316 06.02.2003 US 359765
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(71) |
Applicant: LAM RESEARCH CORPORATION |
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Fremont, CA 94538 (US) |
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(72) |
Inventors: |
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- BOYD, John
Atascadero, CA 93422 (US)
- KUTHI, Andras
Thousand Oaks, CA 91320 (US)
- THIE, William
Mountain View, CA 94040 (US)
- SMITH, Michael, G.R.
Dublin, CA 94568 (US)
- KNOP, Robert
Fremont, CA 94536 (US)
- ANDERSON, Thomas, W.
Livemore, CA 94551 (US)
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(74) |
Representative: Thomson, Paul Anthony et al |
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Potts, Kerr & Co. 15, Hamilton Square BirkenheadMerseyside CH41 6BR BirkenheadMerseyside CH41 6BR (GB) |
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