(19)
(11) EP 1 590 828 A2

(12)

(88) Date of publication A3:
29.12.2004

(43) Date of publication:
02.11.2005 Bulletin 2005/44

(21) Application number: 03800161.6

(22) Date of filing: 23.12.2003
(51) International Patent Classification (IPC)7H01L 21/302
(86) International application number:
PCT/US2003/041226
(87) International publication number:
WO 2004/071938 (26.08.2004 Gazette 2004/35)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(30) Priority: 06.02.2003 US 360322
06.02.2003 US 360320
06.02.2003 US 360316
06.02.2003 US 359765

(71) Applicant: LAM RESEARCH CORPORATION
Fremont, CA 94538 (US)

(72) Inventors:
  • BOYD, John
    Atascadero, CA 93422 (US)
  • KUTHI, Andras
    Thousand Oaks, CA 91320 (US)
  • THIE, William
    Mountain View, CA 94040 (US)
  • SMITH, Michael, G.R.
    Dublin, CA 94568 (US)
  • KNOP, Robert
    Fremont, CA 94536 (US)
  • ANDERSON, Thomas, W.
    Livemore, CA 94551 (US)

(74) Representative: Thomson, Paul Anthony et al
Potts, Kerr & Co. 15, Hamilton Square
BirkenheadMerseyside CH41 6BR
BirkenheadMerseyside CH41 6BR (GB)

   


(54) IMPROVED MEGASONIC CLEANING EFFICIENCY USING AUTO- TUNING OF AN RF GENERATOR AT CONSTANT MAXIMUM EFFICIENCY