MICROMECHANICAL OR MICROOPTOELECTRONIC DEVICES WITH DEPOSIT OF GETTER MATERIAL AND INTEGRATED HEATER, AND SUPPORT FOR THE PRODUCTION THEREOF - Patent 1592643

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EP 1 592 643 A2

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(88)	Date of publication A3:
	06.01.2005

(43)	Date of publication:
	09.11.2005 Bulletin 2005/45

(21)	Application number: 03786227.3

(22)	Date of filing: 24.12.2003

(51)	International Patent Classification (IPC)⁷: B81B 7/00

(86)	International application number:
	PCT/IT2003/000857

(87)	International publication number:
	WO 2004/065289 (05.08.2004 Gazette 2004/32)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
	Designated Extension States:
	AL LT LV MK

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Priority:

17.01.2003 IT MI20030069

(71)	Applicant: SAES GETTERS S.p.A.
	20020 Lainate (Milano) (IT)

(72)	Inventor:
	AMIOTTI, Marco I-20010 Cornaredo (IT)

(74)	Representative: Adorno, Silvano et al
	c/o SOCIETA' ITALIANA BREVETTI S.p.A. Via Carducci, 8 20123 Milano 20123 Milano (IT)

(54)	MICROMECHANICAL OR MICROOPTOELECTRONIC DEVICES WITH DEPOSIT OF GETTER MATERIAL AND INTEGRATED HEATER, AND SUPPORT FOR THE PRODUCTION THEREOF