(19)

(11)

EP 1 597 409 A1

(12)

(43) Date of publication: 23.11.2005 Bulletin 2005/47 (21) Application number: 03816093.3 (22) Date of filing: 20.02.2003

(51) International Patent Classification (IPC)7: C23C 16/513, H01J 37/32, C23C 16/455 (86) International application number: PCT/US2003/005209 (87) International publication number: WO 2004/076716 (10.09.2004 Gazette 2004/37)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR Designated Extension States: AL LT LV MK RO (71) Applicant: GENERAL ELECTRIC COMPANY Schenectady, NY 12345 (US)	(72) Inventor: SCHAEPKENS, Marc Ballston Lake, NY 12019 (US) (74) Representative: Szary, Anne Catherine  London Patent Operation General Electric International, Inc. 15 John Adam Street London WC2N 6LU London WC2N 6LU (GB)