| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
Designated Extension States: |
|
AL LT LV MK |
| (30) |
Priority: |
20.02.2003 US 371603
28.02.2003 US 377943
|
| (71) |
Applicant: LAM RESEARCH CORPORATION |
|
Fremont, CA 94538-6516 (US) |
|
| (72) |
Inventors: |
|
- BOYD, John, M.
Atascadero, CA 93422 (US)
- RAVKIN, Michael
Sunnyvale, CA 94087 (US)
- REDEKER, Fred, C.
Fremont, CA 94539 (US)
- TREUR, Randolph, E.
San Luis Obispo, CA 93401 (US)
- THIE, William
Mountain View, CA 94040 (US)
|
| (74) |
Representative: Thomson, Paul Anthony et al |
|
Potts, Kerr & Co. 15, Hamilton Square
BirkenheadMerseyside CH41 6BR
BirkenheadMerseyside CH41 6BR (GB) |
|
