(19)
(11) EP 1 599 904 A1

(12)

(43) Date of publication:
30.11.2005 Bulletin 2005/48

(21) Application number: 02786852.0

(22) Date of filing: 03.12.2002
(51) International Patent Classification (IPC)7H01L 23/62, H01L 27/01
(86) International application number:
PCT/US2002/038546
(87) International publication number:
WO 2004/051749 (17.06.2004 Gazette 2004/25)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SI SK TR
Designated Extension States:
AL LT LV MK RO

(71) Applicant: International Business Machines Corporation
Armonk, N.Y. 10504 (US)

(72) Inventors:
  • MANDELMAN, Jack
    Flat Rock, NC 28731 (US)
  • VOLDMAN, Steven, H.
    South Burlington, VT 05403 (US)

(74) Representative: Waldner, Philip 
IBM United Kingdom Limited, Intellectual Property Department, Hursley Park
Winchester,Hampshire SO21 2JN
Winchester,Hampshire SO21 2JN (GB)

   


(54) LATERAL LUBISTOR STRUCTURE AND METHOD