METHOD OF ELECTROPLATING A WORKPIECE HAVING HIGH-ASPECT RATIO HOLES - Patent 1601822

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EP 1 601 822 A1

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(43)	Date of publication:
	07.12.2005 Bulletin 2005/49

(21)	Application number: 04707942.1

(22)	Date of filing: 04.02.2004

(51)	International Patent Classification (IPC)⁷: C25D 7/12, C25D 5/18, H05K 3/24

(86)	International application number:
	PCT/EP2004/002208

(87)	International publication number:
	WO 2004/081262 (23.09.2004 Gazette 2004/39)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
	Designated Extension States:
	AL LT LV MK

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Priority:

10.03.2003 DE 10311575

(71)	Applicant: ATOTECH Deutschland GmbH
	10553 Berlin (DE)

(72)	Inventors:
	REENTS, Bert 10407 Berlin (DE) MAGAYA, Tafadzwa 10553 Berlin (DE)

(74)	Representative: Bressel, Burkhard
	Effert, Bressel und Kollegen, Patentanwälte, Radickestrasse 48 12489 Berlin (Adlershof) 12489 Berlin (Adlershof) (DE)

(54)	METHOD OF ELECTROPLATING A WORKPIECE HAVING HIGH-ASPECT RATIO HOLES