(19)
(11) EP 1 603 829 A1

(12)

(43) Date of publication:
14.12.2005 Bulletin 2005/50

(21) Application number: 03709977.7

(22) Date of filing: 13.03.2003
(51) International Patent Classification (IPC)7B81B 3/00, B81C 1/00
(86) International application number:
PCT/GB2003/001069
(87) International publication number:
WO 2004/080886 (23.09.2004 Gazette 2004/39)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated Extension States:
AL LT LV MK

(71) Applicant: BTG INTERNATIONAL LIMITED
London EC4M 7SB (GB)

(72) Inventors:
  • MONTELIUS, Lars, G.
    Bjerred (SE)
  • LING, Torbjorn, G., I.
    Lund (SE)
  • LITWIN, Andrej
    Danderyd (SE)

(74) Representative: Simpson, Paul Christopher 
BTG International Limited 10 Fleet Place Limeburner Lane
GB-London EC4M 7SB
GB-London EC4M 7SB (GB)

   


(54) MEMS DEVICES ON A NANOMETER SCALE