(19)

(11)

EP 1 604 395 A2

(12)

(88) Date of publication A3: 16.06.2005 (43) Date of publication: 14.12.2005 Bulletin 2005/50 (21) Application number: 04720379.9 (22) Date of filing: 12.03.2004

(51) International Patent Classification (IPC)7: H01L 21/31, H01L 31/072, C30B 23/00, C23C 16/00 (86) International application number: PCT/US2004/007564 (87) International publication number: WO 2004/084268 (30.09.2004 Gazette 2004/40)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR Designated Extension States: AL LT LV MK (30) Priority: 13.03.2003 US 455226 P 14.05.2003 US 470584 P 17.02.2004 US 545442 P (71) Applicant: ASM America, Inc. Phoenix, AZ 85034-7200 (US)

(72) Inventors: BRABANT, Paul, D. Phoenix, Arizona 85044 (US) ITALIANO, Joseph, P. Phoenix, Arizona 85048 (US) ARENA, Chantal, J. Mesa, Arizona 85025 (US) TOMASINI, Pierre Phoenix,Arizona 85008 (US) RAAIJMAKERS, Ivo Bilthoven, 3723 HD (AN) BAUER, Matthias 72585 Riederich (DE) (74) Representative: Sternagel, Fleischer, Godemeyer & Partner  Braunsberger Feld 29 51429 Bergisch Gladbach 51429 Bergisch Gladbach (DE)