(19)
(11) EP 1 608 007 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
26.09.2012 Bulletin 2012/39

(45) Mention of the grant of the patent:
15.08.2012 Bulletin 2012/33

(21) Application number: 04721668.4

(22) Date of filing: 18.03.2004
(51) International Patent Classification (IPC): 
H01L 21/316(2006.01)
C23C 16/56(2006.01)
H01L 21/3105(2006.01)
H01L 29/51(2006.01)
 H01L 21/318(2006.01)
C23C 16/455(2006.01)
H01L 21/314(2006.01)
H01L 21/28(2006.01)
(86) International application number:
PCT/JP2004/003638
(87) International publication number:
WO 2004/086485 (07.10.2004 Gazette 2004/41)

(54)

METHOD FOR FORMING INSULATING FILM IN SEMICONDUCTOR DEVICE

VERFAHREN ZUR BILDUNG EINES ISOLATIONSFILMS IN EINEM HALBLEITERBAUELEMENT

PROCEDE DE FORMATION DE FILM ISOLANT DANS UN DISPOSITIF SEMICONDUCTEUR

(84) Designated Contracting States:
BE DE FI FR

(30) Priority: 24.03.2003 JP 2003079279

(43) Date of publication of application:
21.12.2005 Bulletin 2005/51

(73) Proprietors:
  • HORIBA, LTD.
    Kyoto-shi, Kyoto 601-8510 (JP)
  • Renesas Electronics Corporation
    Nakahara-ku, Kawasaki-shi, Kanagawa 211-8668 (JP)
  • ROHM CO., LTD.
    Kyoto-shi, Kyoto 615-8585 (JP)

(72) Inventors:
  • TOMINAGA, Koji c/o Horiba, Ltd.
    Kyoto-shi, Kyoto 601-8510 (JP)
  • YASUDA, T. Nat. Inst. of AdvancedInd. Science and
    Tsukuba-shi, Ibaraki 305-8562 (JP)
  • NABATAME, Toshihide c/o Renesas Technology Corp.
    Chiyoda-ku, Tokyo 100-6334 (JP)
  • IWAMOTO, Kunihiko c/o Rohm Co., Ltd.
    Kyoto-shi, Kyoto 615-8585 (JP)

(74) Representative: Cross, Rupert Edward Blount 
Boult Wade Tennant Verulam Gardens 70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB)


(56) References cited: : 
EP-A1- 1 326 271
WO-A1-02/099868
JP-A- 2003 188 171
US-A1- 2002 076 946
US-B1- 6 228 781
 WO-A1-02/23614
JP-A- 2003 017 684
JP-A- 2003 347 298
US-A1- 2003 003 635
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).