WAFER CARRIER HAVING IMPROVED PROCESSING CHARACTERISTICS - Patent 1609171

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EP 1 609 171 A2

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(88)	Date of publication A3:
	12.05.2005

(43)	Date of publication:
	28.12.2005 Bulletin 2005/52

(21)	Application number: 04718089.8

(22)	Date of filing: 05.03.2004

(51)	International Patent Classification (IPC)⁷: H01L 21/00

(86)	International application number:
	PCT/US2004/006847

(87)	International publication number:
	WO 2004/095545 (04.11.2004 Gazette 2004/45)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
	Designated Extension States:
	AL LT LV MK

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Priority:

28.03.2003 US 402915

(71)	Applicant: Saint-Gobain Ceramics and Plastics, Inc.
	Worcester, MA 01615-0138 (US)

(72)	Inventors:
	BUCKLEY, Richard, F. Shrewsbury, Massachusetts 01545 (US) HAERLE, Andrew, G. Sutton, Massachusetts 01590 (US) Chang, Han C.,Science-Based Industrial Park 300 ROC Hsin-Chu City (TW)

(74)	Representative: Leidescher, Thomas et al
	Zimmermann & Partner, Postfach 33 09 20 80069 München 80069 München (DE)

(54)	WAFER CARRIER HAVING IMPROVED PROCESSING CHARACTERISTICS