(19)
(11) EP 1 610 135 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
04.03.2009 Bulletin 2009/10

(45) Mention of the grant of the patent:
08.10.2008 Bulletin 2008/41

(21) Application number: 04723013.1

(22) Date of filing: 24.03.2004
(51) International Patent Classification (IPC): 
G01R 31/28(2006.01)
(86) International application number:
PCT/JP2004/004046
(87) International publication number:
WO 2004/088339 (14.10.2004 Gazette 2004/42)

(54)

TEST DEVICE AND TEST METHOD

TESTEINRICHTUNG UND TESTVERFAHREN

APPAREIL ET PROCEDE D'ESSAI

(84) Designated Contracting States:
DE GB IT

(30) Priority: 31.03.2003 US 403817

(43) Date of publication of application:
28.12.2005 Bulletin 2005/52

(60) Divisional application:
07075969.1 / 1884789

(73) Proprietor: ADVANTEST CORPORATION
Nerima-ku, Tokyo 179-0071 (JP)

(72) Inventor:
  • Ichiyoshi, Seiji, c/o Advantest Corporation
    Tokyo 179-0071 (JP)

(74) Representative: Pfenning, Meinig & Partner GbR 
Patent- und Rechtsanwälte Theresienhöhe 13
80339 München
80339 München (DE)


(56) References cited: : 
JP-A- 3 128 473
US-A- 5 931 953
 JP-A- 63 298 178
US-A- 6 028 439
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).