(19)

(11)

EP 1 611 593 A2

(12)

(88) Date of publication A3: 10.11.2005 (43) Date of publication: 04.01.2006 Bulletin 2006/01 (21) Application number: 02808369.9 (22) Date of filing: 28.05.2002

(51) International Patent Classification (IPC):  H01J 41/04(1974.07) G01L 21/32(1968.09) (86) International application number: PCT/US2002/011321 (87) International publication number: WO 2005/091330 (29.09.2005 Gazette 2005/39)

(84) Designated Contracting States: DE FR GB (71) Applicant: Inficon, Inc. East Syracuse, NY 13057 (US)	(72) Inventors: ELLEFSON, Robert, E. Manlius, NY 13104 (US) FREES, Louis, C. Manlius, NY 13104 (US) (74) Representative: Wehnert, Werner et al Patentanwälte Hauck, Graalfs, Wehnert, Döring, Siemons, Schildberg Schwanthalerstrasse 106 80339 München 80339 München (DE)