(19)
(11)
EP 1 614 162 A2
(12)
(88)
Date of publication A3:
16.12.2004
(43)
Date of publication:
11.01.2006
Bulletin 2006/02
(21)
Application number:
04759937.8
(22)
Date of filing:
16.04.2004
(51)
International Patent Classification (IPC):
H01L
29/10
(1974.07)
(86)
International application number:
PCT/US2004/011818
(87)
International publication number:
WO 2004/095583
(
04.11.2004
Gazette 2004/45)
(84)
Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL HR LT LV MK
(30)
Priority:
16.04.2003
US 417021
(71)
Applicant:
RAYTHEON COMPANY
Waltham, MA 02451 (US)
(72)
Inventor:
LUM, Wing Y.
Santa Barbara, CA 93111 (US)
(74)
Representative:
Lindner, Michael
Witte, Weller & Partner, Patentanwälte, Postfach 105462
70047 Stuttgart
70047 Stuttgart (DE)
(54)
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