(19)
(11) EP 1 615 735 A2

(12)

(88) Date of publication A3:
27.01.2005

(43) Date of publication:
18.01.2006 Bulletin 2006/03

(21) Application number: 04749998.3

(22) Date of filing: 12.04.2004
(51) International Patent Classification (IPC): 
B08B 7/04(1968.09)
B25J 11/00(1968.09)
 B08B 9/00(1968.09)
(86) International application number:
PCT/US2004/011159
(87) International publication number:
WO 2004/093147 (28.10.2004 Gazette 2004/44)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL HR LT LV MK

(30) Priority: 10.04.2003 US 462428 P
08.04.2004 US 820646

(71) Applicant: Entegris, Inc.
Chaska, MN 55318 (US)

(72) Inventors:
  • NISHIKATA, Yasukatsu
    Tokyo (JP)
  • ISHII, Kenji
    Tokyo (JP)
  • OTSUKI, Kazufumi
    Tokyo (JP)
  • KURUSU, Katsuhiro
    Tokyo (JP)

(74) Representative: Legg, Cyrus James Grahame 
ABEL & IMRAY, 20 Red Lion Street
London WC1R 4PQ
London WC1R 4PQ (GB)

   


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