(19)

(11)

EP 1 618 035 A2

(12)

(88) Date of publication A3: 09.06.2005 (43) Date of publication: 25.01.2006 Bulletin 2006/04 (21) Application number: 04759543.4 (22) Date of filing: 15.04.2004

(51) International Patent Classification (IPC):  B63B 1/34(1968.09) B64C 1/38(1968.09) B64B 1/14(1968.09) (86) International application number: PCT/US2004/011580 (87) International publication number: WO 2004/091792 (28.10.2004 Gazette 2004/44)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR Designated Extension States: AL HR LT LV MK (30) Priority: 15.04.2003 US 462963 P 03.06.2003 US 454742 29.08.2003 US 652586 (71) Applicant: Entegris, Inc. Chaska, MN 55318 (US)	(72) Inventors: EXTRAND, Charles, W. Minneapolis, MN 55419 (US) WRIGHT, Michael Greenwood, MN 55331 (US) (74) Representative: Legg, Cyrus James Grahame et al ABEL & IMRAY, 20 Red Lion Street London WC1R 4PQ London WC1R 4PQ (GB)