(19)
(11) EP 1 620 517 A2

(12)

(88) Date of publication A3:
11.11.2004

(43) Date of publication:
01.02.2006 Bulletin 2006/05

(21) Application number: 04719748.8

(22) Date of filing: 11.03.2004
(51) International Patent Classification (IPC): 
C09G 1/02(1968.09)
C09K 3/14(1968.09)
(86) International application number:
PCT/US2004/007468
(87) International publication number:
WO 2004/083328 (30.09.2004 Gazette 2004/40)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(30) Priority: 17.03.2003 US 455216 P
08.10.2003 US 509445 P
05.03.2004 US 

(71) Applicant: ENGELHARD CORPORATION
Iselin, NJ 08830-0770 (US)

(72) Inventors:
  • MATHUR, Sharad
    Macon, GA 31210 (US)
  • MOINI, Hamad
    Princeton, NJ 08540 (US)
  • PETROVIC, Ivan
    Princeton, NJ 08540 (US)

(74) Representative: Fisher, Adrian John et al
CARPMAELS & RANSFORD 43-45 Bloomsbury Square
London WC1A 2RA
London WC1A 2RA (GB)

   


(54) SLURRY COMPOSITIONS FOR USE IN A CHEMICAL-MECHANICAL PLANARIZATION PROCESS HAVING NON-SPHERICAL ABRASIVE PARTICLES