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EP 1 620 880 A1

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(43) Date of publication: 01.02.2006 Bulletin 2006/05 (21) Application number: 04730068.6 (22) Date of filing: 28.04.2004

(51) International Patent Classification (IPC):  H01L 21/02(1974.07) H01L 27/12(1974.07) (86) International application number: PCT/JP2004/006178 (87) International publication number: WO 2004/100233 (18.11.2004 Gazette 2004/47)

(84) Designated Contracting States: BE DE FR GB IT NL (30) Priority: 07.05.2003 JP 2003128917 (71) Applicant: CANON KABUSHIKI KAISHA Tokyo 146 (JP)	(72) Inventor: YONEHARA, Takao Ohta-ku, Tokyo 1468501 (JP) (74) Representative: TBK-Patent  Bavariaring 4-6 80336 München 80336 München (DE)