(19)
(11) EP 1 622 743 A2

(12)

(88) Date of publication A3:
20.01.2005

(43) Date of publication:
08.02.2006 Bulletin 2006/06

(21) Application number: 04758852.0

(22) Date of filing: 01.04.2004
(51) International Patent Classification (IPC): 
B24B 1/00(1968.09)
B24B 51/00(1968.09)
B24B 49/00(1968.09)
(86) International application number:
PCT/US2004/010326
(87) International publication number:
WO 2004/090502 (21.10.2004 Gazette 2004/43)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(30) Priority: 01.04.2003 US 459876 P
05.05.2003 US 469449 P

(71) Applicant: Filmetrics, Inc.
San Diego, CA 92123 (US)

(72) Inventors:
  • CHALMERS, Scott A.
    La Jolla, CA 92037 (US)
  • GEELS, Randall S.
    El Cajon, CA 92019 (US)
  • BIBBY, Thomas F. A.
    St. Albans, Vermont 05478 (US)

(74) Representative: Potter, Julian Mark et al
Mintz Levin Cohn Ferris Glovsky and Popeo Intellectual Property LLP, The Rectory, 9 Ironmonger Lane
London EC2V 8EY
London EC2V 8EY (GB)

   


(54) WHOLE-SUBSTRATE SPECTRAL IMAGING SYSTEM FOR CMP